高純氣體供應表
|
氣 體 |
規 格 |
雜 質 含 量（ppm) |
|
CO2 |
99.9995％ |
N2≦1.5 O2≦1.0 H20≦1.5 總烴≦1.0 |
|
99.999％ |
N2≦4.0 O2≦2.0 H20≦3.0 總烴≦1.0 |
|
|
99.995 ％ |
N2≦20.0 O2≦8.0 H20≦8.0 總烴≦2.0 |
|
|
99.95 ％ |
N2≦280. O2≦60. H20≦20. 總烴≦10. |
|
|
He |
99.999～99.9996％ |
H2≦0. O2+Ar≦2 N2≦5 CO2≦0.5 CH4≦0.5 |
|
99.99～99.995％ |
Ne<1.0 CO<1.0 CH4<1.0 CO2<1.0 O2+Ar<10 H2O<10 |
|
|
Ar |
99.999％ |
N2≤5.0 O2≤2.0 H2≤1.0 CH4≤2.0 H2O≤4.0 |
|
N2 |
99．999％ |
O2≤3.0 H2≤1.0 CH4≤3.0 H2O≤5.0 |
|
H2 |
99．999％ |
N2≤5.0 O2<2.0 H2O<2.0 |
|
O2 |
99.995％ |
Ar<10.0 N2<20.0 H2O≤3.0 CO+CO2+CH4≤3.0 |
|
99.999％ |
Ar≤2.0 N2≤5.0 H2O≤2.0 CO+CO2+CH4≤1.0 |
|
|
CH4 |
99.995％ |
O2 (Ar)≤5.0 N2≤15.0 H2≤5.0 C2H6≤15.0 H2O≤5.0 |
|
99.99％ |
O2(Ar)≤10.0 N2≤35.0? H2≤10.0 C2H6≤25.0 H2O≤15.0 |
|
|
99.9％ |
O2(Ar)≤50.0 N2≤250.0 H2≤ 50.0 C2H6≤500.0 H2O≤50.0 |
|
|
CO |
99.95％ |
O2≤150.0 N2≤300.0 H2O≤20.0 |
|
99.9％ |
O2≤300.0 N2≤600.0 H2O≤50.0 |
|
|
NH3 |
99.999％ |
O2≤2.0 N2≤5.0 CO+CO2+CH4≤2.0 H2O≤5.0 總雜質含量≤10.0 |
|
Ne |
99.999％ |
N2<2.0 CO<0.05 He<6.0 H2O<1.0 O2+Ar<1.0 CH4<1.0 |